Use of novel methods for the investigation of the boron distribution in CVD diamond

Acta Materialia

Volumn 47, Issue 15, 1999, Pages 4025-4030

  Steeds, J W ^a   Gilmore, A ^a   Charles, S ^a   Heard, P ^a   Howarth, B ^a   Butler, J E ^b  

^a UNIVERSITY OF BRISTOL   (United Kingdom)

^b NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BORON; CHEMICAL VAPOR DEPOSITION; ELECTRON IRRADIATION; EMISSION SPECTROSCOPY; PHOTOLUMINESCENCE; RAMAN SPECTROSCOPY; SECONDARY ION MASS SPECTROMETRY; SEMICONDUCTING DIAMONDS; SEMICONDUCTING FILMS; SEMICONDUCTOR DOPING; TRANSMISSION ELECTRON MICROSCOPY;

MICRO RAMAN SPECTROSCOPY; PHOTOLUMINESCENCE SPECTROSCOPY;

DIAMOND FILMS;

EID: 0033349948     PISSN: 13596454     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1359-6454(99)00262-1     Document Type: Article

References (23)

1. Samlenski R., Hang C., Brenn R., Wild C., Locher R., Koidl P. Diamond Rel. Mat. 5:1996;947.
2. Ruan J., Kobashi K., Choyke W.J. Appl. Phys. Lett. 60:1992;1884.
3. Sakaguchi I., Nishitani-Gamo M., Loh K.P., Yamamoto K., Haneda H., Ando T. Diamond Rel. Mat. 7:1998;1144.
4. Huang J.T., Hu C.S., Hwang J., Chang H., Lee L.J. Appl. Phys. Lett. 67:1995;2382.
5. Sahli S., Aslam D.M. Appl. Phys. Lett. 70:1997;2129.
6. Steeds, J. W., Charles, S., Davis, T. J., Gilmore, A., Hayes, J., Pickard, C. D. O. and Butler, J. E., Diamond Rel. Mat., 1999, 8, 94.
7. Heard, P. J., Unpublished work.
8. Koike J., Parkin D.M., Mitchell T.E. Appl. Phys. Lett. 60:1992;1450.
9. Barr D.L., Brown W.L. J. Vac. Sci. Technol. B. 13:1995;2580.
10. Gonon P., Gheeraert E., Deneuville A., Fontaine F., Abello L., Lucazeau G. J. appl. Phys. 78:1995;7059.
11. Cerdeira F., Fjeldly T.A., Cardona M. Phys. Rev. B. 8:1973;4734.
12. Pavone P., Karch K., Schutt U., Winde W., Strauch D., Gianozzi P., Bavoni S. Phys. Rev. B. 48:1993;3156.
13. Collins A.T., Williams A.W.S. J. Phys. C: Solid St. Phys. 4:1971;1789.
14. Walker J. Rep. Prog. Phys. 42:1979;1605.
15. Halperin A., Vermeulen L.A. J. Phys. Chem. Solids. 44:1983;77.
16. Kalish R. Davies G. Properties and Growth of Diamond. EMIS Data Review Series No. 9. 1994;IEE, Exeter. Chap. 6.10.
17. Mainwood A., Lowther J.E., Van Wyk J.A. J. Phys. Condens. Matter. 5:1993;7935.
18. Davies, G., and Manson, N.B., Ind. Diamond Rev., 1980, p. 50.
19. Collins, A. T., in The Physics of Diamond, Proceedings of the International School of Physics "Enrico Fermi" Course CXXXV, ed. A. Paoletti and A. Tucciarone. IOS Press, Amsterdam, 1997.
20. Kalish R., Richter V., Cheifetz E., Zalman A., Yona P. Appl. Phys. Lett. 73:1998;46.
21. Farabaugh E.N., Robins L., Feldman A., Johnson C.E. J. Mater. Res. 10:1995;1448.
22. Wang W.L., Polo M.C., Sanchez G., Cifre J., Esteve J. J. appl. Phys. 80:1996;1846.
23. Ager J.W., Walakiewicz W., McCluskey M., Plano M.A., Landstrass M.I. Appl. Phys. Lett. 66:1995;616.