Elaboration, characterization and aging effects of porous silicon microcavities formed on lightly p-type doped substrates

Semiconductor Science and Technology

Volumn 14, Issue 12, 1999, Pages 1052-1059

  Mulloni, V ^a   Mazzoleni, C ^a   Pavesi, L ^a  

^a UNIVERSITY OF TRENTO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

AGING OF MATERIALS; POROUS SILICON; QUANTUM EFFICIENCY; SEMICONDUCTOR DOPING; THERMAL EFFECTS;

MICROCAVITIES;

CAVITY RESONATORS;

EID: 0033345083     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/14/12/307     Document Type: Article

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