Improvement of e-beam observability by testing-pad placement in lsi design layout

IEICE Transactions on Electronics

Volumn E82-C, Issue 2, 1999, Pages 387-392

  Kuji, Norio ^a   Takeda, Tadao ^a  

^a NTT CORPORATION   (Japan)

Author keywords

E beam tester; Local field effects; Multi level wiring; Observability; Stacked vias; Testing pads

Indexed keywords

ALGORITHMS; COMPUTER AIDED DESIGN; DATABASE SYSTEMS; ELECTRIC FIELD EFFECTS; ELECTRIC WIRE; ELECTRODES; ELECTRON BEAMS; LSI CIRCUITS; MASKS;

ELECTRON BEAM OBSERVABILITY; ELECTRON BEAM TESTER; LOCAL FIELD EFFECTS; MULTILEVEL WIRING; TESTING PAD PLACEMENT;

INTEGRATED CIRCUIT LAYOUT;

EID: 0033341791     PISSN: 09168524     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)

1. M. Murase, "Advanced LSI failure analysis and its limitation," IEICE. Technical Report, R94-3, 1994.
2. M. Ino, T. Tsuchiya, K. Takeya, and T. Sakai, "LSI applications of 0. 25-pm CMOS/SIMOX technology," Proc. ISDM'96, pp. 482-484, April 1996.
3. N. Kuji and T. Takeda, "Electron beam testing in the quartermicron technology era," Proc. 1996 Electronics Society Conference of IEICE, C-479, pp. 140-141.
4. N. Kuji and T. Takeda, "Automated placement of testing pads for electron-beam observation," Proc. 8lh European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, pp. 1565-1568, Oct. 1997.
5. Y. H. Morimoto, H. Koyama, S. Kawazu, T. Kaito, and A. Adachi, "Anew VLSI diagnosis technique: Focused ion beam assisted multi-level circuit probing," Reliability Physics 25th Annual Proceedings, pp. 111-117, 1987.
6. M. Sanada, S. Suzuki, T. Numajiri, T. Omata, and N. Yoshida, "Evaluation of LSI with multi-metal layers exposed using RIE," Proc. LSI Testing Symposium 1994, pp. 175-181.
7. M. Kageyama, Y. Kajita, H. Hashimoto, Y. Harada, J. Ida, M. Yoshimaru, and H. Onoda. "Formation of stacked via structure for multilayer interconnections," Proc. 1995 Electronics Society Conference of IEICE, C-414, pp. 107-108.
8. Cadence Inc. , DEF/LEF Language Reference Manual 4. 4, Dec. 1994.
9. H. Fujioka, K. Nakamae, and K. Ura, "Local field effects on voltage measurements in the SEM," SEM/I, pp. 323-332, 1981.
10. H. Kawamoto, "Electron beam prober using in-the-lens-analyser and its application," Xlth ICEM, Kyoto, pp. 627-628, 1986.
11. K. Shirakawa and N. Kuji, "Fault diagnostic technology for LSI circuits by E-beam tester," NTT R&D, vol. 41, no. 10, pp. 1221-1232, Oct. 1992.