Fabrication and characterization of a microsystem for a micro-scale heat transfer study

Journal of Micromechanics and Microengineering

Volumn 9, Issue 4, 2020, Pages 422-428

  Jiang, Linan ^a   Wang, Yuelin ^b   Wong, Man ^a   Zohar, Yitshak ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

^b ZHEJIANG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CHANNEL FLOW; HEAT TRANSFER; MICROMACHINING; SEMICONDUCTING SILICON; TEMPERATURE MEASUREMENT; THERMISTORS;

MICROCHANNELS;

MICROSENSORS;

EID: 0033339891     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/9/4/320     Document Type: Article

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