A liquid metal ion source in a high energy microprobe setup

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 158, Issue 1-4, 1999, Pages 119-123

  Adamczewski, J ^a   Stephan, A ^a   Meijer, J ^a   Backer, H W ^a   Bukow, H H ^a   Rolfs, C ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

Brightness; Heavy ions; Ion microprobe; LMIS

Indexed keywords

CURRENT DENSITY; ELECTROSTATIC ACCELERATORS; FOCUSING; GALLIUM; ION BEAMS; LIQUID METALS; MAGNETIC LENSES; SOLENOIDS; SUPERCONDUCTING MAGNETS;

ION MICROPROBES;

ION SOURCES;

EID: 0033338233     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(99)00510-8     Document Type: Article

References (8)

1. P.D. Prewett, G.L.R. Mair, Focused Ion Beams From Liquid Metal Ion Sources, Wiley, New York, 1991.
2. A. Stephan, J. Meijer, J. Adamczewski, H. Röcken, D. Löffelmacher, H.H. Bukow, C. Rolfs, Nucl. Instr. and Meth. B 113 (1996) 387.
3. J. Adamczewski, D. Löffelmacher, J. Meijer, A. Stephan, H.H. Bukow, C. Rolfs, Nucl. Instr. and Meth. B 130 (1997) 57.
4. D. Löffelmacher, J. Adamczewski, A. Stephan, J. Meijer, H. Röcken, H.H. Bukow, C. Rolfs, Nucl. Instr. and Meth. 139 (1998) 422.
5. G.D. Alton, P.M. Read, Nucl. Instr. and Meth. B 54(1991) 7.
6. J. Adamczewski, Ph.D. thesis, Ruhr-Universität Bochum, 1999.
7. C. Lejeune, J. Aubert, Adv. Elec. Electron Phys. 13A (1980) 159.
8. J. Meijer et al., these proceedings (ICNMTA-6), Nucl. Instr. and Meth. B 158 (1999) 39.