An emittance scanning device for liquid metal ion sources

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 139, Issue 1-4, 1998, Pages 422-427

  Loffelmacher D ^a   Adamczewski, J ^a   Stephan, A ^a   Meijer, J ^a   Rocken H ^a   Bukow, H H ^a   Rolfs, C ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

Brightness; Emittance; Ion microprobe; Ion source; LMIS

Indexed keywords

ELECTRIC CURRENTS; GALLIUM; ION BEAMS; LENSES; LIQUID METALS; PARTICLE ACCELERATORS; PARTICLE BEAM EXTRACTION; PARTICLE OPTICS;

EMITTANCE SCANNING DEVICES; ION MICROPROBES; LIQUID METAL ION SOURCES (LMIS);

ION SOURCES;

EID: 0342499973     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00033-0     Document Type: Article

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