Towards a visual modeling approach to designing microelectromechanical system transducers

Journal of Micromechanics and Microengineering

Volumn 9, Issue 4, 1999, Pages 332-340

  Dewey, Allen ^a   Srinivasan, Vijay ^a   Icoz, Evrim ^a  

^a Duke University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGEBRA; COMPUTER AIDED DESIGN; COMPUTER HARDWARE DESCRIPTION LANGUAGES; DIFFERENTIAL EQUATIONS; INTERACTIVE COMPUTER SYSTEMS; TRANSDUCERS;

MICROELECTROMECHANICAL SYSTEM TRANSDUCERS; STRUCTURED TOPOLOGICAL DESIGN STRATEGY;

MICROELECTROMECHANICAL DEVICES;

EID: 0033334665     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/9/4/308     Document Type: Article

References (37)

1. Abbott B et al 1993 Model-based software synthesis IEEE Software 10 42-52
2. Burnett M and McIntyre D 1995 Visual programming Computer 28 14-16
3. Nguyen C T-C 1991 Electromechanical characterization of microresonators for circuit applications MS Thesis UC, Berkeley
4. Crary S, Juma O and Zhang Y 1991 Software tools for designers of sensor and actuator CAE systems Proc. Transducers'91 (San Francisco, CA, 24-27 June, 1991) (IEEE) pp 498-501
5. DeRoo D 1988 Determination of Young's modulus of polysilicon using resonant micromechanical beams MS Report University of Wisconsin, Madison
6. Dewey A and Fair R 1998 Microelectromechanical systems (MEMS) design and design automation research at Duke University Proc. Int. Conf. on Modeling and Simulation of Microsystems, Semiconductors, Sensors, and Actuators, (Santa Clara, CA, April 1998) (IEEE)
7. Dewey A, Zhang T, Ren H and Wu J 1998 Parametric regression analysis of microelectromechanical resonators IEEE/VIUF Proc. Behavioral Modeling Simulation (BMAS) (October, 1998) (IEEE)
8. Dewey A, Dussault H, Hanna J, Christen E, Fedder G and Maher M 1999 Energy-based characterization of microelectromechanical systems (MEMS) and component modeling using VHDL-AMS Proc. Modeling and Simulation of Microsystems, Semiconductors, Sensors, and Actuators (MSM) (April, 1999) (IEEE)
9. Dorey A and French P 1983 Frequency output piezoresistive pressure sensors Sensors Actuators 4 (1) 77-83
10. Eckmuller J, Gropl M and Grab H 1998 Hierarchical characterization of analog integrated CMOS circuits Proc. Design, Automation and Test in Europe (February, 1998) (IEEE) pp 636-43
11. Erskine J 1983 Polycrystalline silicon on metal strain gauge transducers IEEE Trans. Electron Devices 30 796-801
12. Fisher G 1994 Domain-oriented design environments Automated Software Engineering (Boston: Kluwer Academic) pp 177-203
13. Frank F and Staller J 1990 The merging of micromachining and microelectronics 3rd Int. Forum on ASIC and Transducer Technology (Alberta, Canada, May, 1990) pp 53-60
14. Hierold C et al 1996 A pure CMOS surface micromachined integrated accelerometer Proc. 9th IEEE Micro Electro Mechanical Systems Workshop (San Diego, CA, 11-15 February, 1996) (IEEE) pp 174-9
15. Howe R 1987 Resonant microsensor 4th Int. Conf. on Solid-State Sensors and Actuators (Transducer'87) (Tokyo) (IEEE) pp 834-49
16. Howe R 1990 Silicon micromechanics: sensors and actuators on a chip IEEE Spectrum 27 (7) 29-35
17. Ingalls D et al 1988 Fabrik: a visual programming environment Proc. ACM Conference Object Oriented Programming, Systems, Languages, and Applications (OOPSLA 88) (New York, 1988) (New York: ACM) pp 176-90
18. Kaminsky G 1985 Micromachining of silicon mechanical structures J. Vacuum Sci. Technol. B 3 1015-24
19. Khazan A 1994 Transducers and their Elements: Design and Application (Englewood Cliffs, NJ: Prentice-Hall)
20. Kimura T et al 1986 A visual language for keyboardless programming Technical Report WUCS-86-6, Department of Computer Science, Washington University, St. Louis
21. Kramer J et al 1989 Graphical configuration programming Computer 22 53-65
22. Lo N, Berg E, Quakkelaar S, Somin J, Tachiki M, Lee H and Pister K 1996 Parametrized layout, synthesis, extraction and SPICE simulation for MEMS Proc. ISCAS'96 (Atlanta, GA, 12-15 May, 1996) (IEEE) vol 4, pp 481-4
23. Mahadevan R 1990 Analytical modeling of electrostatic structures Proc. IEEE Micro Mechanical Systems (Napa Valley, CA, 11-14 February, 1990) (IEEE) pp 120-7
24. Massobrio G, Martinoia S and Grattarola M 1994 Use of SPICE for modeling silicon-based chemical sensors Sensors Mater. 6 101-23
25. Middelhoek S and Audet A 1989 Silicon Sensors (Academic)
26. Petersen K 1982 Silicon as a mechanical material Proc. IEEE 70 420-57
27. Repenning A and Summer T 1994 Programming as problem solving Proc. Workshop on Advanced Visual Interfaces (New York: ACM) pp 182-91
28. Rezink D, Brown S and Canny J 1997 Dynamic simulation as a design tool for a microactuator array Proc. 1997 IEEE Int. Conf. on Robotics and Automation (Albuquerque, NM, 20-25 April, 1997) (IEEE) vol 2, pp 1675-80
29. Romanowicz B 1997 Methodology for the modeling and simulation of microsystems Doctoral Dissertation Institute of Microsystems, Swiss Federal Institute of Technology of Lausanne
30. Scholliers J and Yli-Pietila T 1995 A SPICE-based library for mechatronic systems Proc. ICAS'95 (Seattle, WA, 3-7 April, 1995) (IEEE) vol 1, pp 668-71
31. Shankland E 1990 Silicon pressure sensors with built-in temperature sensor Transducer Technol. 13 (9) 24-6
32. Smith J et al 1995 Embedded micromechanical devices for the monolithic integration of MEMS and CMOS Proc. Int. Electron Devices Meeting (Washington DC, 10-13 December, 1995) (IEEE) pp 609-12
33. Tang W C, Nguyen T-C, Judy M W and Howe R T 1990 Electrostatic comb drive of lateral polysilicon resonators Sensors Actuators A 21 328-31
34. Tang W C 1989 Electrostatic comb drive for resonant sensor and actuator applications PhD Dissertation University of California, Berkeley, CA
35. Tilmans H 1993 Micro-mechanical sensors using encapsulated built-in resonant strain gauges PhD Dissertation MESA Research Institute, University of Twente, Enschede, The Netherlands
36. Tonouchi T et al 1992 Creating visual objects by direct manipulation IEEE Workshop on Visual Languages (Los Alamitos, CA: IEEE Computer Socety) pp 95-101
37. Walsh R 1995 Electromechanical Design Handbook (New York: McGraw-Hill)