Nitrogen implantation into carbon: Retention, release and target-erosion processes

Journal of Nuclear Materials

Volumn 275, Issue 2, 1999, Pages 158-163

  Grigull, S ^a,b   Behrisch, R ^a   Parascandola, S ^b  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

^b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

FILMS; ION BOMBARDMENT; ION IMPLANTATION; NITROGEN; PLASMAS; THERMAL EFFECTS;

CARBON FILMS; ELASTIC RECOIL DETECTION; NITROGEN RECYCLING BEHAVIOR; RESIDUAL GAS ANALYSIS;

CARBON;

EID: 0033320103     PISSN: 00223115     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3115(99)00112-9     Document Type: Article

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