Offset reduction of Hall plates in three different crystal planes

Sensors and Actuators, A: Physical

Volumn 66, Issue 1-3, 1998, Pages 23-28

  Bellekom, Sandra ^a   Sarro, Pasqualina M ^b  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Hall plates; Offset; Piezoresistive effect

Indexed keywords

MATHEMATICAL MODELS; PIEZOELECTRICITY; SENSORS; STRESS ANALYSIS;

HALL PLATES; MAGNETIC SENSORS; PIEZORESISTIVE EFFECTS;

HALL EFFECT DEVICES;

EID: 0032048645     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01700-7     Document Type: Article

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