Intrinsic stress dependence of Pt hillock formation and its related electrical properties of SBT capacitor

Integrated Ferroelectrics

Volumn 25, Issue 1-4, 1999, Pages 299-309

  Kweon, Soon Yong ^a   Yeom, Seung Jin ^a   Sun, Ho Jung ^a   Kim, Nam Kyeong ^a   Yu, Yong Sik ^a   Lee, Sahang Kyoo ^a  

^a Hynix Semiconductor Inc   (South Korea)

Author keywords

Intrinsic stress; Pt hillock; Pt Ti electrode; SBT; Short probability

Indexed keywords

ANNEALING; CAPACITORS; ELECTRIC PROPERTIES; ELECTRODES; MAGNETRON SPUTTERING; SCANNING ELECTRON MICROSCOPY; STRESS ANALYSIS; STRONTIUM COMPOUNDS; TEMPERATURE; THERMAL EFFECTS;

INTRINSIC STRESS; PLATINUM HILLOCK FORMATION; STRONTIUM BISMUTH TANTALATE;

PLATINUM;

EID: 0033311608     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589908210180     Document Type: Article

References (7)

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