Assessment of intrinsic-layer growth temperature to high-deposition-rate a-Si:H n-i-p solar cells deposited by hot-wire CVD

Materials Research Society Symposium - Proceedings

Volumn 557, Issue , 1999, Pages 163-168

  Wang, Q I ^a   Iwantczko, Eugene ^a   Yueqin, X U ^a   Nelson, Brent P ^a   Mahan, A H ^a  

^a NATIONAL RENEWABLE ENERGY LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CHEMICAL VAPOR DEPOSITION; DIFFUSION IN SOLIDS; ELECTRONIC PROPERTIES; SOLAR CELLS; STRUCTURE (COMPOSITION); SUBSTRATES;

HOT WIRE CHEMICAL VAPOR DEPOSITION; HYDROGENATED AMORPHOUS SILICON; INTRINSIC LAYER GROWTH;

AMORPHOUS SILICON;

EID: 0033299967     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-557-163     Document Type: Article

References (16)

1. A.H. Mahan, J. Carapella, B.P. Nelson, R.S. Crandall, and I. Baiberg, J. Appl Phys., 69, p. 6728 (1991).
2. Y. Wu, J.T. Stephen, D.X. Han, J.M. Rutland, R.S. Crandall, and A.H. Mahan, Phys. Rev. Lett.,11, p. 2049 (1996).
3. A.H. Mahan, D.L. Wiliiamson, and T.E. Furtak, Mat. Res. Soc. Proc., Vol. 467, p. 657 (1997).
4. X. Liu, B.E. White Jr., R.O. Pohl, E. Iwaniczko, K.M. Jones, A.H. Mahan, B.P. Nelson, R.S. Crandall, and S. Veprek, Phys. Rev. Lett., 78, p. 4418 (1997).
5. B.P. Nelson, E. Iwaniczko, R.E.I. Schropp, A.H. Mahan, B.C. Molenbroek, S. Salamon, and R.S. Crandall. 12thPVSC, pp. 679-682 (1994).
6. P. Papadopulos, A. Scholz, S. Bauer, B. Schroeder, and H. Oechsner, J. Non-Cryst. Sol., 164-166, p. 87(1993).
7. A.H. Mahan, E. Iwaniczko, B.P. Nelson, R.C. Reedy Jr. T. Unold, R.S. Crandall, S.Guha, and J. Yang, AIP Conf. Proc., 394, p. 27 (1996).
8. S.Bauer, W. Herst, B. Schroeder, and H. Oechsner, Proc. 26th IEEE PF Spec. Conf., p. 719 (1997).
9. A.H. Mahan, R.C. Reedy Jr., E. Iwaniczko, Qi Wang, B.P. Nelson,Y. Xu, A. C. Gallagher, H.M. Branz, R.S. Crandall, J. Yang, and S. Guha. Mat. Res. Soc. Proc., V507, p. 119 (1998).
10. M. Vanecek, A.H. Mahan, B.P. Nelson, and R.S. Crandall, Proc. llth European PV Solar Energy Conf., p. 96. (1993).
11. J. Yang, X. Xu, and S. Guha, Mat. Res. Soc. Proc. Vol 336, p. 687 (1994).
12. L. Yang and L.-F. Chen, Mat. Res. Soc. Proc. Vol 336, p. 669 (1994).
13. P. Siamchai and M. Konagai, Appl. Phys. Lett., 67, p. 3468 (1995).
14. B. Rech, S. Wieder, F. Siebke, C. Beneking, and H. Wagner. Mat. Res. Soc. Proc., Vol 420, p. 33 (1996).
15. Daxing Han, Tamihiro Gotoh, Motoi Nishio, Tomonari Sakamoto, Shuichi Nonomura, Shoji Nitta, Qi Wang, E. Iwaniczko, Harv Mahan. National Center for Photovoltaic Program Review ,462, p. 260 (1998).
16. Qi Wang, Homer Antoniadis, E. A. Schiff, and S. Guha, Mat. Res. Soc. Proc. ,Vol 258, p. 881 (1992).