Structure-property correlation in low K dielectric materials

Materials Research Society Symposium - Proceedings

Volumn 565, Issue , 1999, Pages 69-79

  Morgen, Michael ^a   Zhao, Jie Hua ^a   Hay, Michael ^a   Cho, Taiheui ^a   Ho, Paul S ^a  

^a UNIVERSITY OF TEXAS AT AUSTIN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS; PERMITTIVITY; POROSITY; STRUCTURE (COMPOSITION); THERMODYNAMIC STABILITY;

STRUCTURE PROPERTY CORRELATION; THERMOMECHANICAL PROPERTIES;

DIELECTRIC MATERIALS;

EID: 0033297435     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-565-69     Document Type: Article

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