메뉴 건너뛰기




Volumn 104, Issue , 1999, Pages 21-30

Computational model for Free Abrasive Machining of brittle silicon using a wiresaw

Author keywords

[No Author keywords available]

Indexed keywords

ABRASIVES; BRITTLENESS; COMPUTATIONAL METHODS; ELASTOHYDRODYNAMICS; FINITE ELEMENT METHOD; MACHINING; MATHEMATICAL MODELS;

EID: 0033297156     PISSN: None     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (7)

References (17)
  • 1
    • 0342811631 scopus 로고    scopus 로고
    • Elastohydrodynamic interaction in the free abrasive wafer slicing using a wiresaw: Modeling and finite element analysis
    • in print
    • Bhagavat, M.; Prasad, V.; and Kao, I. 1998a. Elastohydrodynamic interaction in the free abrasive wafer slicing using a wiresaw: Modeling and finite element analysis. in print-ASME Journal of Tribology.
    • (1998) ASME Journal of Tribology
    • Bhagavat, M.1    Prasad, V.2    Kao, I.3
  • 2
    • 0342376715 scopus 로고    scopus 로고
    • Elastoplastic finite element analysis of indentations in free abrasive machining
    • Bhagavat, M.; Yang, F.; and Kao, I. 1998b. Elastoplastic finite element analysis of indentations in free abrasive machining. In Proceedings of IMECE'98.
    • (1998) Proceedings of IMECE'98
    • Bhagavat, M.1    Yang, F.2    Kao, I.3
  • 4
    • 0027608609 scopus 로고
    • A model for lapping of glass
    • Buijs, M. and Houten, K. 1993. A model for lapping of glass. J. Material Science 28:3014-3020.
    • (1993) J. Material Science , vol.28 , pp. 3014-3020
    • Buijs, M.1    Houten, K.2
  • 5
    • 0027576959 scopus 로고
    • Role of indentation fracture in free abrasive machining of ceramics
    • Chauhan, R.; Ahn, Y.; Chandrashekhar, S.; and Farris, T. 1993. Role of indentation fracture in free abrasive machining of ceramics. Wear 162:246-257.
    • (1993) Wear , vol.162 , pp. 246-257
    • Chauhan, R.1    Ahn, Y.2    Chandrashekhar, S.3    Farris, T.4
  • 6
    • 0031920304 scopus 로고    scopus 로고
    • Effect of slurry viscosity modification on oxide and tungsten cmp
    • Grover, G.; Liang, H.; Ganeshkumar, S.; and Fortino, W. 1998. Effect of slurry viscosity modification on oxide and tungsten cmp. Wear 214:10-13.
    • (1998) Wear , vol.214 , pp. 10-13
    • Grover, G.1    Liang, H.2    Ganeshkumar, S.3    Fortino, W.4
  • 9
    • 0343024826 scopus 로고    scopus 로고
    • Vibration of wiresaw manufacturing processes and wafer surface measurement
    • Monterrey, Mexico
    • Kao, I.; Wei, S.; and Chiang, F.-P. 1998c. Vibration of wiresaw manufacturing processes and wafer surface measurement. In NSF Design and Manufacturing Grantees Conference, Monterrey, Mexico. Pages 427-428.
    • (1998) NSF Design and Manufacturing Grantees Conference , pp. 427-428
    • Kao, I.1    Wei, S.2    Chiang, F.-P.3
  • 10
    • 0017555307 scopus 로고
    • A model for crack initiation in elastic/plastic indentation fields
    • Lawn, B. and Evans, A. 1977. A model for crack initiation in elastic/plastic indentation fields. Journal of Material Science 12:2195-2199.
    • (1977) Journal of Material Science , vol.12 , pp. 2195-2199
    • Lawn, B.1    Evans, A.2
  • 11
    • 0016427812 scopus 로고
    • Microfacture beneath point indentations in brittle solids
    • Lawn, B. and Swain, M. 1975. Microfacture beneath point indentations in brittle solids. Journal of Material Science 10:113-122.
    • (1975) Journal of Material Science , vol.10 , pp. 113-122
    • Lawn, B.1    Swain, M.2
  • 12
    • 0032099414 scopus 로고    scopus 로고
    • Modeling stresses of contacts in wiresaw slicing of polycrystalline and crystalline ingots: Application to silicon wafer production
    • Li, J.; Kao, I.; and Prasad, V. 1998. Modeling stresses of contacts in wiresaw slicing of polycrystalline and crystalline ingots: Application to silicon wafer production. ASME Journal of Electronics Packaging 120(2):123-128.
    • (1998) ASME Journal of Electronics Packaging , vol.120 , Issue.2 , pp. 123-128
    • Li, J.1    Kao, I.2    Prasad, V.3
  • 13
    • 0023326751 scopus 로고
    • A review of indentation fracture theory: Its development, principles and limitations
    • Ostojic, P. and McPherson, R. 1987. A review of indentation fracture theory: Its development, principles and limitations. International Journal of Fracture 33:297-312.
    • (1987) International Journal of Fracture , vol.33 , pp. 297-312
    • Ostojic, P.1    McPherson, R.2
  • 14
    • 0029161374 scopus 로고
    • On machining rate of hydrodynamic polishing process
    • Su, Y.; Wang, S.; and Hsiau, J. 1995. On machining rate of hydrodynamic polishing process. Wear 188:77-87.
    • (1995) Wear , vol.188 , pp. 77-87
    • Su, Y.1    Wang, S.2    Hsiau, J.3
  • 15
    • 0030294678 scopus 로고    scopus 로고
    • Effect of surface irregularities on machining rate of hydrodynamic polishing process
    • Su, Y.; Hong, C.; Hwang, Y.; and Guo, W. 1996a. Effect of surface irregularities on machining rate of hydrodynamic polishing process. Wear 199:89-94.
    • (1996) Wear , vol.199 , pp. 89-94
    • Su, Y.1    Hong, C.2    Guo, W.3
  • 16
    • 0030085036 scopus 로고    scopus 로고
    • Ultra precision machining by hydrodynamic polishing process
    • Su, Y.; Hong, C.; Wang, S.; and Jang, S. 1996b. Ultra precision machining by hydrodynamic polishing process. Int. J. Mach. Tools Manufacturing 36(2):275-291.
    • (1996) Int. J. Mach. Tools Manufacturing , vol.36 , Issue.2 , pp. 275-291
    • Su, Y.1    Hong, C.2    Wang, S.3    Jang, S.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.