Micromachined array studies of tin oxide films: Nucleation, structure and gas sensing characteristics

Materials Research Society Symposium - Proceedings

Volumn 574, Issue , 1999, Pages 213-218

  Panchapakesan, B ^a,b   Devoe, D L ^a,b   Cavicchi, R E ^c   Wallon, R M ^c   Semancik, S ^c  

^a UNIVERSITY OF MARYLAND   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

^c NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSIS; CHEMICAL SENSORS; FILM GROWTH; METALLOGRAPHIC MICROSTRUCTURE; MICROMACHINING; SEMICONDUCTING TIN COMPOUNDS; ULTRATHIN FILMS; VAPOR DEPOSITION;

OXIDE SENSING FILMS; SEEDED GROWTH; TIN OXIDES;

SEMICONDUCTING FILMS;

EID: 0033279640     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-574-213     Document Type: Article

References (6)

1. W. Göpel, J. Hesse and J.N. Zemel, Sensors: A Comprehensive Survey, Volume 8, (VCH Publishers Inc., Weinheim, Federal Republic of Germany, 1995), p.13.
2. M. Madou in Technical Digest, Solid State Sensor and Actuator Workshop, Hilton Head, 1994, pp. 164-171
3. M. J. Madou and S. R. Morrison, Chemical Sensing with Solid State Devices, (Academic press, 1988), pp.178-182.
4. R.E. Cavicchi, J.S. Suehle, P. Chaparala, K.G. Kreider, M. Gaitan and S. Semancik in Technical Digest, Solid State Sensor and Actuator Work Shop, Hilton Head, 1994, pp.53-57.
5. S. Semancik, R.E. Cavicchi, K.G. Kreider, J.S. Suehle and P. Chaparala, Sensors and Actuators B 34, 209, (1996).
6. F. DiMeo Jr., S. Semancik, R.E. Cavicchi, J.S. Suehle, P. Chaparala and N.H. Tea in MetalOrganic Chemical Vapor Deposition of Electronic Ceramics II, edited by Seshu B. Desu, David B. Beach, and Peter C. VanBuskirk (Mater. Res. Soc. Proc. 415, Pittsburgh, PA, 1996), pp.231-236.