3-D calculation of copper sputtering yield by Monte Carlo method

Journal of the Korean Physical Society

Volumn 35, Issue SUPPL. 4, 1999, Pages

  Ban, Yongchan ^a   Won, Taeyoung ^a   Lee, Jaehee ^b  

^a Inha University   (South Korea)

^b Hynix Semiconductor Inc   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033275543     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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