Characterization of CoSi2 formation by x-ray photoelectron spectroscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 6, 1999, Pages 2570-2574

  Zhao, Jin ^a   Jones, Clive M ^a   Poirier, Derrick M ^b  

^a ADVANCED MICRO DEVICES   (United States)

^b Physical Electronics Inc Minnesota   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033274609     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (18)

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