Surface chemistry of II-VI semiconductor ZnSe studied by time of flight secondary ion mass spectrometry and x-ray photoelectron spectroscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3048-3054

  Zhao, J ^a,b   Na, M H ^a   Lee, E H ^a   Chang, H C ^a   Gardella Jr , J A ^a   Luo, H ^a  

^a UNIVERSITY AT BUFFALO   (United States)

^b ADVANCED MICRO DEVICES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0007072699     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590340     Document Type: Article

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