Light emission microscopy for reliability studies

Microelectronic Engineering

Volumn 49, Issue 1, 1999, Pages 169-180

  Leroux, Charles ^a   Blachier, Denis ^a  

^a CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICS; FAILURE ANALYSIS; HOT CARRIERS; OPTICAL MICROSCOPY; RELIABILITY; VLSI CIRCUITS;

LIGHT EMISSION MICROSCOPY;

MICROELECTRONICS;

EID: 0033225652     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(99)00437-2     Document Type: Article

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