Back side emission microscopy for failure analysis

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2874, Issue , 1996, Pages 238-247

  Wu, Nevil M ^a   Tang, Kenneth ^a   Lin, James H ^a  

^a AGERE SYSTEMS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EMISSION MICROSCOPY; PHOTON EMISSION;

DIES; FAILURE ANALYSIS; LIGHT EMISSION; MICROSCOPIC EXAMINATION; PHOTONS; SEMICONDUCTOR JUNCTIONS; SILICON;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0030394384     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)