Chemical role of refractory metal caps in Co silicidation: Evidence of SiO2 reduction by Ti cap

Journal of Materials Research

Volumn 14, Issue 11, 1999, Pages 4402-4408

  Kondoh, E ^a,c   Conard, T ^c   Brijs, B ^c   Jin, S ^c   Bender, H ^c   De Potter, M ^c   Maex, K ^b,c  

^a KYUSHU INSTITUTE OF TECHNOLOGY   (Japan)

^b UNIVERSITY OF LEUVEN   (Belgium)

^c IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COBALT; DIFFUSION IN SOLIDS; REFRACTORY METALS; SILICA; SILICON; TITANIUM NITRIDE;

SILICIDATION;

INTERFACES (MATERIALS);

EID: 0033221443     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1999.0595     Document Type: Article

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