Low-temperature synthesis of gallium nitride thin films using reactive rf-magnetron sputtering

Physica Status Solidi (A) Applied Research

Volumn 176, Issue 1, 1999, Pages 329-332

  Bondar, V ^a   Kucharsky, I ^a   Simkiv, B ^a   Akselrud, L ^a   Davydov, V ^a   Dubov, Yu ^a   Popovich, S ^a  

^a IVAN FRANKO NATIONAL UNIVERSITY OF LVIV   (Ukraine)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; LOW TEMPERATURE OPERATIONS; MAGNETRON SPUTTERING; SEMICONDUCTING FILMS; SEMICONDUCTOR DEVICE MANUFACTURE; SPUTTER DEPOSITION; SYNTHESIS (CHEMICAL); THIN FILMS;

GALLIUM NITRIDE; REACTIVE MAGNETRON SPUTTERING;

SEMICONDUCTING GALLIUM COMPOUNDS;

EID: 0033221328     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1521-396X(199911)176:1<329::AID-PSSA329>3.0.CO;2-E     Document Type: Article

References (9)

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