AlN films grown on diamond and silicon carbide

Diamond and Related Materials

Volumn 8, Issue 7, 1999, Pages 1267-1271

  Gorodetsky, A E ^a   Zalavutdinov, R Kh ^a   Zakharov, A P ^a   Hsu, W L ^b   Spitsyn, B V ^a   Bouilov, L L ^a   Stoyan, V P ^a  

^a RUSSIAN ACADEMY OF SCIENCES   (Russian Federation)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

6H SiC; Aluminum nitride; CVD; Diamond; Heteroepitaxy

Indexed keywords

ALUMINUM COMPOUNDS; CHEMICAL VAPOR DEPOSITION; CRYSTAL STRUCTURE; DIAMOND FILMS; DIAMONDS; EPITAXIAL GROWTH; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SILICON CARBIDE; SINGLE CRYSTALS; SUBSTRATES; SURFACES; TEXTURES;

ALUMINUM NITRIDE; BILAYERED STRUCTURES; STRUCTURAL CHANGES; SURFACE LAYERS; TWINNING STRUCTURES; WURTZITE;

FILMS;

EID: 0033165189     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(99)00120-X     Document Type: Article

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