Application of aluminum nitride films for electronic devices

Diamond and Related Materials

Volumn 8, Issue 2-5, 1999, Pages 369-372

  Belyanin, A F ^a   Bouilov, L L ^b   Zhirnov, V V ^c   Kamenev, A I ^d   Kovalskij, K A ^d   Spitsyn, B V ^b  

^a 4 Ivan Franko Str 121351   (Russian Federation)

^b RUSSIAN ACADEMY OF SCIENCES   (Russian Federation)

^c SHUBNIKOV INSTITUTE OF CRYSTALLOGRAPHY   (Russian Federation)

^d MOSCOW STATE UNIVERSITY   (Russian Federation)

Author keywords

Acoustoelectronics; Aluminum nitride; Emission; Thermoprinting

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ALUMINUM COMPOUNDS; AMORPHOUS FILMS; CRYSTAL STRUCTURE; ELECTRONIC EQUIPMENT; FILM GROWTH; MAGNETRON SPUTTERING; NITRIDES; PIEZOELECTRIC DEVICES; SPUTTER DEPOSITION; TEXTURES; THIN FILM DEVICES;

ACOUSTOELECTRONICS; ALUMINUM NITRIDE; THERMOPRINTING;

PROTECTIVE COATINGS;

EID: 0032622259     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00412-9     Document Type: Article

References (3)

1. A.F. Belyanin, Materialy 7 Mezhdunarodnogo Simpoziuma "Tonkije plenki v electronike", Yoshkar-Ola. July, 1996, pp. 167 (in Russian).
2. Belyanin A.F., Blaut-Blachev A.N., Bouilov L.L., Spitsyn B.V. J. Chem. Vap. Dep. 5:1997;267.
3. Spitsyn B.V., Zhirnov V.V., Blaut-Bachev A.N., Bormatova L.V., Belyanin A.F., Pashchenko P.V., Bouilov L.L., Givargizov E.I. Diamond Relat. Mater. 7:1997;692.