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Volumn 38, Issue 7 B, 1999, Pages 4508-4511
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Ellipsometric monitoring of first stages of diamond nucleation in a bias-enhanced surface-wave-excited microwave plasma
a
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Author keywords
[No Author keywords available]
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Indexed keywords
CARBONIZATION;
CRYSTAL GROWTH;
ELLIPSOMETRY;
MICROWAVES;
NUCLEATION;
PLASMA APPLICATIONS;
SIMULATION;
SLOT ANTENNAS;
SURFACE STRUCTURE;
SURFACE WAVES;
BIAS ENHANCED NUCLEATION;
HIGH DENSITY NUCLEI;
IN PROCESS MONITORING;
INCUBATION;
NEGATIVE BIAS APPLICATION;
NUCLEI GROWTH;
SURFACE ANALYSIS;
SURFACE WAVE EXCITED PLASMA;
DIAMOND FILMS;
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EID: 0033157679
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.38.4508 Document Type: Article |
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Times cited : (4)
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References (13)
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