X-ray residual stress measurement of TiN film deposited by an arc ion plating method

Zairyo/Journal of the Society of Materials Science, Japan

Volumn 48, Issue 7, 1999, Pages 699-704

  Matsue, Tatsuya ^a   Hanabusa, Takao ^b   Ikeuchi, Yasukazu ^a   Miki, Yasuhiro ^c   Mattani, Eiji ^d  

^a NIIHAMA NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

^b UNIVERSITY OF TOKUSHIMA   (Japan)

^c Nara Prefectural Institute of Industrial Technology   (Japan)

^d Tokushima Pref Inst of Ind Technol   (Japan)

Author keywords

Arc ion plating; Residual stress; Titanium nitride; Vickers micro hardness; X ray diffraction; X ray photoelectron spectroscopy

Indexed keywords

CRYSTAL ORIENTATION; METALLIC FILMS; PLATING; PRESSURE EFFECTS; RESIDUAL STRESSES; STAINLESS STEEL; SURFACE ROUGHNESS; VICKERS HARDNESS TESTING; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

ARC ION PLATING; STRESS MEASUREMENT;

TITANIUM NITRIDE;

EID: 0033155604     PISSN: 05145163     EISSN: None     Source Type: Journal    
DOI: 10.2472/jsms.48.699     Document Type: Article

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