Vapor phase epitaxial liftoff of GaAs and silicon single crystal films

Solar Energy Materials and Solar Cells

Volumn 58, Issue 2, 1999, Pages 141-146

  Chang, W ^a   Kao, C P ^a   Pike, G A ^a   Slone, J A ^a   Yablonovitch, E ^a  

^a Department of Civil and Environmental Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROFLUORIC ACID; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING SILICON; SINGLE CRYSTALS; VAPOR PHASE EPITAXY; VLSI CIRCUITS;

EPITAXIAL LIFTOFF;

SEMICONDUCTING FILMS;

EID: 0033148265     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-0248(98)00194-9     Document Type: Article

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