A new test method for contactless quantitative current measurement via scanning magneto-resistive probe microscopy

Microelectronics Reliability

Volumn 38, Issue 6-8, 1998, Pages 969-974

  Bae, S ^a   Schlensog, A ^a   Mertin, W ^a   Kubalek, E ^a   Maywald, M ^b  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

^b SIEMENS AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENT MEASUREMENT; FAILURE ANALYSIS; MAGNETIC FIELDS; MAGNETORESISTANCE;

SCANNING MAGNETO-RESISTIVE PROBE MICROSCOPY;

INTEGRATED CIRCUIT TESTING;

EID: 0032084053     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(98)00071-7     Document Type: Article

References (10)

1. Leyk A. and Kubalek E., Electron. Lett. Vol. 31 No 24 (1995), 2089-2091
2. Weingarten K., Rodwell M. and Bloom D., IEEE J. Quantum Electron. Vol. QE-24 No. 2 (1988) 198-220
3. Chandrachood J., Majundar A. and Carrejo J., IEEE Electron Dev. Lett. Vol. 16 No. 7 (1995) 312-315
4. Cramer R., Bruchaus L. and Balk L., Microelectron. Reliab. Vol. 37 No. 10/11 (1997) 1583-1586
5. Campbell A, Cole E., Dodd B. and Anderson R.E., Microelectron. Eng. 24 (1994), 11-22.
6. Helmreich K., Nagel P., Wolz W.and Müller-Glaser K., Microelectron. Eng. 16(1992), 173-182.
7. Lee T., Dantsker E. and Clarke J., Rev. Sci. Instrum. Vol. 67 No. 12 (1996) 4208-4215
8. Tsang C., Fontana R., Lin T., Heim D., Speriosu V., Gurney B. and Williams M., IEEE Trans. Magn. Vol. 30 NO. 6 (1994) 3801-3806
9. Clemens W., Van den Berg H.,and Rupp G., J. Appl. Phys. Vol. 81 No. 8 (1997), 4310-4312.
10. Küpfmüller E. and Kohn E, Theoretische Elektortechnik und Elektronik (14th edn). Spinger, Berlin, pp 1993, 296-301.