Chemical polishing of stainless steel for ultrahigh vacuum wall material

Vacuum

Volumn 53, Issue 1-2, 1999, Pages 325-328

  Inayoshi, S S ^a   Sato, Y ^a   Saito, K ^a   Tsukahara, S ^a   Hara, Y ^a   Amano, S ^a   Ishizawa, K ^b   Nomura, T ^b   Shimada, A ^b   Kanazawa, M ^b  

^a ULVAC INC   (Japan)

^b San ai Plant Construction Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEGASSING; STAINLESS STEEL; SURFACE TREATMENT; TEMPERATURE PROGRAMMED DESORPTION; VACUUM;

OUTGASSING RATE; ULTRAHIGH VACUUM;

CHEMICAL POLISHING;

EID: 0033132243     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(98)00422-9     Document Type: Article

References (4)

1. Inayoshi S, Sato Y, Saito K, Tsukahara S, Kara Y, Amano S, Ishizawa K, Nomura T, Shimad A, Kanazawa M. J Vac Soc Japan 1998;41:96.
2. Komoto Y, et al. Proc ISEM-6, Krakow, Poland, 1980:362.
3. Inayoshi S, Sito K, Ikeda Y, Yang Y, Tsukahara S. J Vac Soc Japan 1993;36:238.
4. Saito K, Sato Y, Inayoshi S, Tukahara S. Vacuum 1996;47:749.