Measurement system for low outgassing materials by switching between two pumping paths

Vacuum

Volumn 47, Issue 6-8, 1996, Pages 749-752

  Saito, K ^a   Sato, Y ^a   Inayoshi, S ^a   Tsukahara, S ^a  

^a ULVAC INC   (Japan)

Author keywords

Measurement method; Outgassing; Stainless steel; Vacuum materials

Indexed keywords

DEGASSING; DIFFUSION IN SOLIDS; ELECTROLYTIC POLISHING; GLASS; HYDROGEN; MASS SPECTROMETRY; STAINLESS STEEL; VACUUM APPLICATIONS;

GLASS BEADS; OUTGASSING MATERIALS; STAINLESS STEEL CHAMBERS; VACUUM BAKING; VACUUM MATERIALS;

PRESSURE MEASUREMENT;

EID: 0030171874     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0042-207x(96)00149-2     Document Type: Article

References (4)

1. S Inayoshi, K Saito, Y Ikeda, Y Yang and S Tsukahara, J Vac Soc Jpn, 36, 238 (1993).
2. K Saito, Y Sato, S Inayoshi, Y Yang and S Tsukahara, J Vac Soc Jpn, 38, 449 (1995).
3. D M Grant, D L Cummings and D A Blackburn, J Nucl Mater, 152, 139 (1988).
4. M Wutz, H Adam and W Walcher, Theory and Practice of Vacuum Technology, p 62. Friedr. Vieweg and Sohn, Braunschweig/Wiesbaden.