Outgassing Properties of Chemically Polished Stainless Steels

Shinku/Journal of the Vacuum Society of Japan

Volumn 41, Issue 3, 1998, Pages 96-99

  Inayoshi, Sakae ^a   Saito, Kazuya ^a   Sato, Yukie ^a   Tsukahara, Sonoko ^a   Hara, Yasuhiro ^a   Amano, Sigeru ^a   Ishizawa, Katsunobu ^b   Nomura, Takeshi ^b   Simada, Akihisa ^b   Kanazawa, Minoru ^b  

^a ULVAC INC   (Japan)

^b San ai Plant Construction Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; AUGER ELECTRON SPECTROSCOPY; DEGASSING; ELECTROLYTIC POLISHING; OPTIMIZATION; SCANNING ELECTRON MICROSCOPY; STAINLESS STEEL; VACUUM APPLICATIONS;

STAINLESS STEEL SUS304L; ULTRAHIGH VACUUM (UHV);

CHEMICAL POLISHING;

EID: 0031702585     PISSN: 05598516     EISSN: None     Source Type: Journal    
DOI: 10.3131/jvsj.41.96     Document Type: Article

References (7)

1. K. Saito, S. Inayoshi, Y. Ikeda, Y. Yang and S. Tsukahara: J. Vac. Sci Technol., A13 (1995) 556.