Thermodynamics of diamond film deposition at low pressure from chlorinated precursors

Applied Physics A: Materials Science and Processing

Volumn 68, Issue 3, 1999, Pages 359-362

  Liu, Z J ^a   Zhang, D W ^a   Wan, Y Z ^a   Zhang, J Y ^a   Wang, J T ^a  

^a FUDAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACETYLENE; CARBON; CHLORINE; COMPOSITION EFFECTS; DEPOSITION; FILM GROWTH; HYDROGEN; MATHEMATICAL MODELS; METHANE; PHASE DIAGRAMS; THERMODYNAMICS;

DIAMOND GROWTH;

DIAMOND FILMS;

EID: 0033098411     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390050904     Document Type: Article

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