Sealing Method of Dry-Etched AlAs/GaAs Top Mirrors in Vertical Cavity Surface Emitting Lasers

Electrochemical and Solid-State Letters

Volumn 2, Issue 2, 1999, Pages 83-85

  Creusen, M ^a,b   De Bruyn, F ^a   Karouta, F ^a   Van Der Vleuten, W C ^a   Van De Roer, T G ^a   Smalbrugge, E ^a   Van Roy, B H ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

MIRRORS; OXIDATION; PLASMA ETCHING; SEALING (CLOSING); SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTOR LASERS;

DISTRIBUTED BRAGG REFLECTORS; VERTICAL CAVITY SURFACE EMITTING LASERS; WET OXIDATION;

SEMICONDUCTING ALUMINUM COMPOUNDS;

EID: 0033077448     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1390742     Document Type: Article

References (11)

1. D. G. Deppe, D. L. Huffaker, T-H. Oh, H. Deng, and Q. Deng, IEEE J. Quantum Electron., 3, 893 (1997).
2. W. W. Chow, K. D. Choquette, M. H. Crawford, K. L. Lear, and G. R. Hadley, IEEE J. Quantum Electron., 33, 1810 (1997).
3. D. L. Huffaker, D. G. Deppe, C. Lei, and L. A. Hodge, Appl. Phys. Lett., 68, 1948 (1996).
4. D. H. Lim, G. M. Yang, J. H. Kim, K. Y. Lim, and H. J. Lee, Appl. Phys. Lett., 71, 1915 (1997).
5. M. Creusen, M.S. Thesis, Eindhoven University of Technology, Eindhoven, The Netherlands (1996).
6. T. G. van de Roer, M. Creusen, E. Smalbrugge, F. de Bruyn, W. C. van der Vleuten, and F. Karouta, in MOC/GRIN 97, p.96, Waseda University, Tokyo, Japan, Oct 7-9, 1997.
7. F. de Bruyn, MS Thesis, M.S. Thesis, Eindhoven University of Technology, Eindhoven, The Netherlands (1997).
8. J. M. Dallesasse, N. El-Zein, N. Holonyak, Jr., K. C. Hsieh, R. D. Burnham, and R. D. Dupuis, J. Appl. Phys., 68, 2235 (1990).
9. J. M. Dallesasse, N. Holonyak, Jr., A. R. Sugg, T. A. Richard, and N. El-Zein, Appl. Phys. Lett., 57, 2844 (1990).
10. A. R. Sugg, N. Holonyak, Jr., J. E. Baker, F. A. Kish, and J. M. Dallesasse, Appl. Phys. Lett., 58, 1199 (1991).
11. A. R. Sugg, E. I. Chen, N. Holonyak, Jr., K. C. Hsieh, J. E. Baker, and N. Finnegan, J. Appl. Phys., 74, 3880 (1993).