Region-of-interest microtomography for component inspection

IEEE Transactions on Nuclear Science

Volumn 46, Issue 1, 1999, Pages 36-41

  Kalukin, Andrew R ^a   Keane, Denis T ^a   Roberge, Wayne G ^b  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

^b DND CAT Synchrotron Research Center   (United States)

Author keywords

Component inspection; Imaging; Inspection; Microelectronics; Microtomography; Quality control; X rays

Indexed keywords

COMPUTER SIMULATION; IMAGE QUALITY; IMAGE RECONSTRUCTION; IMAGING TECHNIQUES; MICROELECTRONICS; PERFORMANCE; X RAY RADIOGRAPHY;

SPATIAL RESOLUTION; X RAY MICROTOMOGRAPHY;

TOMOGRAPHY;

EID: 0033076573     PISSN: 00189499     EISSN: None     Source Type: Journal    
DOI: 10.1109/23.747765     Document Type: Article

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