Effects of cusp magnetic field configuration on wave propagation in large diameter r.f. produced plasma

Surface and Coatings Technology

Volumn 112, Issue 1-3, 1999, Pages 15-19

  Takechi, Seiji ^a   Shinohara, Shunjiro ^a   Kawai, Yoshinobu ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

Cusp field; Helicon wave; R.f. plasma

Indexed keywords

MAGNETIC FIELD EFFECTS; WAVE PROPAGATION;

CUSP MAGNETIC FIELD;

PLASMA SOURCES;

EID: 0033075797     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)00756-7     Document Type: Article

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