Lowering the limit of detection in high spatial resolution electron beam microanalysis with the microcalorimeter energy dispersive X-ray spectrometer

Ultramicroscopy

Volumn 78, Issue 1-4, 1999, Pages 73-88

  Newbury, Dale ^a   Wollman, David ^a   Irwin, Kent ^a   Hilton, Gene ^a   Martinis, John ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Electron probe X ray microanalysis; Energy dispersive X ray spectrometry; Microanalysis; Microcalorimetry; Scanning electron microscopy; X ray microanalysis; X ray spectrometry

Indexed keywords

CALORIMETERS; ELECTRON BEAMS; ENERGY DISPERSIVE SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; TRACE ANALYSIS;

ELECTRON PROBE X-RAY MICROANALYSIS; MICROCALORIMETERS;

X RAY SPECTROMETERS;

CONFERENCE PAPER; ELECTRON BEAM; ENERGY TRANSFER; MICROANALYSIS; MICROCALORIMETRY; OPTICAL RESOLUTION; PHOTON; SCANNING ELECTRON MICROSCOPE; SEMICONDUCTOR; X RAY; X RAY SPECTROMETRY;

EID: 0033005629     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(99)00028-5     Document Type: Conference Paper

References (8)

1. Goldstein J.I., Newbury D.E., Echlin P., Joy D.C., Romig A.D. Jr., Lyman C.E., Fiori C., Lifshin E. Scanning Electron Microscopy and X-ray Microanalysis. 1992;131-135 Plenum Press, New York.
2. Kanaya K., Okayama S. J. Phys. D. 5:1972;43.
3. Watanabe M., Williams D.W. Ultramicroscopy. 78:1999;89.
4. Wollman D.A., Irwin K.D., Hilton G.C., Dulcie L.L., Newbury D.E., Martinis J.M. J. Microscopy. 188:1997;196.
5. Ziebold T.O. Anal. Chem. 39:1967;859.
6. Ziebold T.O., Ogilvie R.E. Anal. Chem. 36:1964;322.
7. Martinis J.M., Irwin K.D., Wollman D.A., Hilton G.C., Dulcie L.L., Bergren N.F. Microscopy Microanal. 4(suppl 2):1998;172.
8. Irwin K.D., Hilton G.C., Wollman D.A., Martinis J.M. J. Appl. Phys. 83:1998;3978.