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Volumn 31, Issue 7, 1996, Pages 1879-1885

An X-ray photoelectron spectroscopic investigation into the chemical structure of deposits formed from hexamethyldisiloxane/oxygen plasmas

Author keywords

[No Author keywords available]

Indexed keywords

ADDITION REACTIONS; ALUMINUM; BINDING ENERGY; CHEMISTRY; COMPOSITION; DEPOSITS; OXYGEN; STRUCTURE (COMPOSITION); SUBSTRATES; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0030128033     PISSN: 00222461     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF00372203     Document Type: Article
Times cited : (102)

References (20)
  • 20
    • 0343275766 scopus 로고
    • edited by J. A. Semlyen Elsevier Applied Science, Amsterdam
    • P. V. WRIGHT and M. S. BEEVERS, in "Cyclic Polymers", edited by J. A. Semlyen (Elsevier Applied Science, Amsterdam 1986) p. 85.
    • (1986) Cyclic Polymers , pp. 85
    • Wright, P.V.1    Beevers, M.S.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.