Effects of photo-excitation and organic vapor treatment on vapor sorption behavior of sputtered fluoropolymer films

Thin Solid Films

Volumn 338, Issue 1-2, 1999, Pages 291-299

  Sugimoto, Iwao ^a   Shimada, Reiko ^b  

^a NTT CORPORATION   (Japan)

^b NTT Advance Technology Corporation   (Japan)

Author keywords

Fluoropolymer films; Organic vapor sorption; Photo excitation; Radio frequency sputtering; Interaction

Indexed keywords

ELECTRON SPIN RESONANCE SPECTROSCOPY; INFRARED SPECTROSCOPY; RADIATION EFFECTS; SORPTION; SPUTTERING; ULTRAVIOLET RADIATION; VOLATILE ORGANIC COMPOUNDS; X RAY PHOTOELECTRON SPECTROSCOPY;

FLUOROPOLYMER FILMS; PHOTOEXCITATION;

PLASTIC FILMS;

EID: 0032734633     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01085-2     Document Type: Article

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