Properties of poly-Si obtained by Solid Phase Crystallization of differently produced a-Si:H thin films

Solid State Phenomena

Volumn 67, Issue , 1999, Pages 199-204

  Addonizio, M L ^a   Delli Veneri, P ^a   Fameli, G ^a   Loreti, S ^a   Minarini, C ^a   Privato, C ^a   Sinno, G ^a   Terzini, E ^a   Vancini, M ^a  

^a ENEA CR Portici   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS SILICON; ANNEALING; CRYSTALLIZATION; FUSED SILICA; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING FILMS; SUBSTRATES;

POLYSILICON THIN FILMS; SOLID PHASE CRYSTALLIZATION;

SEMICONDUCTING SILICON;

EID: 0032688477     PISSN: 10120394     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.4028/www.scientific.net/ssp.67-68.199     Document Type: Article

References (18)

1. G. Fortunato, Thin Solid Films Vol. 296 82 (1997).
2. th IEEE Conf. (IEEE, Picataway, 1997) p. 575.
3. th EC PVSEC edited by W. Freiesleben, W. Palz, H. A. Ossenbrink and P. Helm (H. S. Stephens & Ass., Bedford,1995) p.1708.
4. th EC PVSEC edited by H.A. Ossenbrink, P. Helm, H. Ehmann (H. S. Stephens & Ass., Bedford,1997) p.597.
5. th IEEE Photovoltaic Specialists Conf. (IEEE, Picataway, 1997) p. 569.
6. th EC PVSEC, edited by H.A. Ossenbrink, P. Helm, H. Ehmann (H. S. Stephens & Ass., Bedford,1997) p.999.
7. th EC PVSEC, edited by R. Hill, W. Palz, P. Helm (H. S. Stephens & Ass., Bedford, 1994) p. 370.
8. D. Ritter, E. Zeldov, K. Weiser, Appl. Phys. Lett. Vol. 49 791 (1986).
9. M. Goerlitzer, N. Beck, P. Torres, J. Meier, N. Wyrsch, J. Appl. Phys. Vol. 80 5111 (1996).
10. G. Conte, G. Nobile, A. Rubino, E. Terzini, F. Villani, D. Caputo, G. de Cesare, F. Irrera, F. Palma, M.C. Rossi, MRS Proceedings, edited by G. S. Higashi, E. A. Irene, T. Ohmi (Materials Research Society, Pittsburgh, 1993) Vol. 297 485 .
11. A.A. Langford, M.L. Fleet, B.P. Nelson, N. Maley, Phys Rev. B Vol. 45 13367 (1992).
12. S. Loreti, C. Minarini, P. Delli Veneri, G. Sinno, to be published.
13. F. Bassani, G. Pastori Parravicini, Electronic States and Optical Transition in Solids, Pergamon Press (1975).
14. R.B. Iverson, R. Reif, J. Appl. Phys., Vol. 62 5 (1987).
15. Nagarajan Sridhar, D.D.L. Chung, W.A. Anderson, J. Coleman, J. Electronic Material Vol 24 No10 1451 (1995)
16. F. Secco d'Aragona, J. Electrochem. Soc. Vol. 119 948 (1972).
17. R.B. Bergmann, J. Krinke, J. Crystal Growth, Vol. 177 191 (1997).
18. R.B. Bergmann, F.G. Shi, J. Krinke, Phys. Rev. Letters, Vol. 80 1011 (1998).