Ion beam technique for real-time measurement of two-dimensional islands during epitaxial growth

Surface Science

Volumn 426, Issue 1, 1999, Pages

  DeLuca, P M ^a   Barnett, S A ^a  

^a Northwestern University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; CRYSTAL ORIENTATION; DIFFUSION IN SOLIDS; ION BEAMS; MOLECULAR BEAM EPITAXY; NUCLEATION; SEMICONDUCTOR GROWTH;

ADATOMS; ION CURRENT; ION SCATTERING;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 0032681743     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(99)00254-X     Document Type: Article

References (21)

1. Robinson V.N.E., Robins J.L. Phil. Mag. 28:1973;1419.
2. Puskeppel A., Harsdorff M. Thin Solid Films. 35:1976;99.
3. Heinemann K., Kim H.K., Poppa H. J. Vac. Sci. Technol. 16:1979;622.
4. Joyce B.A., Vvedensky D.D., Avery A.R., Belk J.G., Dobbs H.T., Jones T.S. Appl. Surf. Sci. 130:1998;132-357.
5. Gruzza B., Gillet E. Thin Solid Films. 68:1980;345.
6. Hansma P.K., Tersoff J. J. Appl. Phys. 61:1987;R1.
7. Altsinger R., Busch H., Horn M., Henzler M. Surf. Sci. 200:1988;235.
8. Mundschau M., Bauer E., Swiech W. Surf. Sci. 203:1988;412.
9. Denier van der Gon A.W., Tromp R.M., Reuter M.C. Thin Solid Films. 236:1993;140.
10. Mo Y.-W., Kleiner J., Webb M.B., Lagally M.G. Phys. Rev. Lett. 66:1991;1998.
11. Deluca P.M., Labanda J.G.C., Barnett S.A. Appl. Phys. Lett. 74:1999;1719.
12. Labanda J.G.C., Barnett S.A. Appl. Phys. Lett. 70:1997;2843.
13. Labanda J.G.C., Hultman L., Barnett S.A. J. Vac. Sci. Technol. B. 13:1995;2260.
14. Neave J.H., Dobson P.J., Joyce B.A., Zhang J. Appl. Phys. Lett. 47:1985;100.
15. Labanda J.G.C., Hultman L., Barnett S.A. Appl. Phys. Lett. 63:1995;3114.
16. Kasu M., Kobayashi N. J. Appl. Phys. 78:1995;3026.
17. P.M. DeLuca, S.A. Barnett, unpublished results.
18. Labanda J.G.C., Barnett S.A. J. Vac. Sci. Technol. A. 15:1997;825.
19. Tersoff J., Johnson M.D., Orr B.G. Phys. Rev. Lett. 78:1997;282.
20. Schwoebel R.L. J. Appl. Phys. 40:1969;614.
21. Bartlet N.C., Theis W., Tromp R.M. Phys. Rev. B. 54:1996;11741.