In situ monitoring of molecular beam epitaxy using specularly scattered ion beam current oscillations

Applied Physics Letters

Volumn 70, Issue 21, 1997, Pages 2843-2845

  Labanda, J G C ^a,b   Barnett, S A ^a  

^a Northwestern University   (United States)

^b University of the Philippines ^*  (Philippines)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; ELECTRIC CURRENT MEASUREMENT; HELIUM; ION BEAMS; MONOLAYERS; OSCILLATIONS; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SEMICONDUCTING GALLIUM ARSENIDE; THERMAL EFFECTS;

ADATOMS; ION SCATTERING;

MOLECULAR BEAM EPITAXY;

EID: 0031142099     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.119020     Document Type: Article

References (15)

1. S. A. Barnett and I. T. Ferguson, in Handbook of Thin Film Technology, edited by D. Glocker and S. I. Shah (IOP, New York, 1995).
2. W. F. Egelhoff, Jr. and I. Jacob, Phys. Rev. Lett. 62, 920 (1989).
3. J. J. de Miguel, A. Sánchez, A. Cebollada, J. M. Gallego, J. Ferrón, and S. Ferrer. Surf. Sci. 189/190, 1062 (1987).
4. R. Kunkel, B. Poelsema, L. Verheij, and G. Comsa. Phys. Rev. Lett. 65, 733 (1990).
5. D. W. Kisker, G. B. Stephenson, P. H. Fuoss, and S. Brennan, J. Cryst. Growth 146, 104 (1995).
6. Y. Enta, T. Horie, N. Miyamoto, Y. Takakuwa, H. Sakamoto, and H. Kato, Surf. Sci. 313, L797 (1994).
7. W. F. Taferner, A. Freundlich, A. Bensaoula, A. Ignatiev, K. Waters, K. Eipers-Smith, M. Guehenneuc, and J. A. Schultz, J. Vac. Sci. Technol. A 12, 3012 (1994), and references therein.
8. J. G. C. Labanda, L. Hultman, and S. A. Barnett, J. Vac. Sci. Technol. B 13, 2260 (1995).
9. J. G. C. Labanda and S. A. Barnett, J. Vac. Sci. Technol. A 14, 485 (1996).
10. J. G. C. Labanda, L. Hultman, and S. A. Barnett, Appl. Phys. Lett. 63, 3114 (1995).
11. H. Niehus, W. Heiland, and E. Taglauer, Surf. Sci. Rep. 17, 213 (1993).
12. N. Matsunami, Y. Yamamura, Y. Itikawa, N. Itoh, Y. Kazumata, S. Miyagawa, K. Monta, R. Shimizu, and H. Tawara, At. Data Nucl. Data Tables 31, 1 (1984).
13. J. G. C. Labanda and S. A. Barnett, J. Vac. Sci. Technol. (in press).
14. J. H. Neave, P. J. Dobson, B. A. Joyce, and J. Zhang, Appl. Phys. Lett. 47, 100 (1985).
15. S. Clarke and D. Vvedensky, J. Appl. Phys. 63, 2272 (1988).