Low energy ion backscattering spectrometry of multi-layer targets

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 136-138, Issue , 1998, Pages 153-158

  Klatt, Ch ^a   Kalbitzer, S ^a   Konac, G ^a  

^a MAX PLANCK INSTITUT FÜR KERNPHYSIK   (Germany)

Author keywords

Electrostatic analyzer; Ion beam scattering; Stopping cross section

Indexed keywords

AMPLIFIERS (ELECTRONIC); BACKSCATTERING; CARBON; ELECTRON ENERGY LEVELS; HELIUM; HYDROGEN; MOLECULAR BEAM EPITAXY; MULTILAYERS; SILICON; SPECTROMETRY;

ELECTROSTATIC ANALYZERS; ENERGY STRAGGLING; NUCLEAR STOPPING POWER;

ION BEAMS;

EID: 0032020297     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00903-8     Document Type: Article

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