Silicon nanoelectronics for the 21st century

Nanotechnology

Volumn 10, Issue 2, 1999, Pages 113-116

  Hu, Chenming ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; MOSFET DEVICES; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES;

SILICON NANOTECHNOLOGY;

NANOTECHNOLOGY;

EID: 0032679692     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/10/2/301     Document Type: Article

References (12)

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10. + double-gate SOI MOSFET IEEE Electron Device Lett. 15 386-8
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