Effects of high energetic He+ ion irradiation on the structure of polymeric hydrogenated amorphous carbon

Microelectronics Journal

Volumn 30, Issue 8, 1999, Pages 801-805

  Zhang, Q ^a   Yoon, S F ^a   Ahn, J ^a   Rusli, ^a   Yang, H ^a   Yang, C ^b   Watt, F ^b   Teo, E J ^b   Osipowice, T ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; DEHYDROGENATION; DIAMOND FILMS; ENERGY GAP; HELIUM; HYDROGENATION; ION IMPLANTATION; PLASTIC FILMS; RAMAN SPECTROSCOPY; REFRACTIVE INDEX;

POLYMERIC HYDROGENATED AMORPHOUS CARBON FILMS;

AMORPHOUS FILMS;

EID: 0032676958     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2692(99)00017-8     Document Type: Article

References (29)

1. Dresselhaus M.S., Kalish R. Ion Implantation in Diamond, Graphite and Related Materials. 1992;Springer, Berlin Heidelberg.
2. Prawer S., Kalish R., Adel M.E., Richter V. Effects of heavy ion irradiation on amorphous hydrogenated (diamond-like) carbon filma. J. Appl. Phys. 61:(9):1987;4492-4500.
3. Rothschild M., Arnone C., Ehrilich D.J. Excimer-laser etching of diamond and hard carbon films by direct writing and optical projection. J. Vac. Sci. Technol. B4:1986;310-314.
4. Wang T., Wang W., Chen B. The irradiation effect of MeV protons on diamond-like carbon films. Nucl. Instr. Meth. Phys. Res. B71:1992;186-190.
5. Wang W.J., Wang T.M., Jing C. Implantation effect of diamond-like carbon films by 110 keV nitrogen ions. Thin Solid Films. 280:1996;90-94.
6. Sato S., Watanabe H., Takahashi K., Abe Y., Iwaki M. Electrical conductivity and Raman spectra of C ion implanted diamond depending on the target temperature. Nucl. Instr. Meth. Phys. Res. B59/60:1991;1391-1394.
7. Wong S.P., Peng S., Ke N., Li P. Effects of fluorine implantation into a-C:H thin films. Diamond and Related Materials. 2:1993;580-583.
8. Adel M.E., Kalish R., Prawer S. J. Appl. Phys. 62:1987;4096.
9. Kolitsch A., Richter E., Drummer H., Roland U., Ullmann J. The effects of a post-treatment of amorphous carbon films with high energy ion beams. Nucl. Instr. Meth. Phys. Res. B106:1995;511-516.
10. Mikkelsen N.J., Eskildsen S.S., Straede C.A., Chechenin N.G. Formation of low friction and wear-resistant carbon coatings on tool steel by 75 keV, high-does carbon ion implantation. Surf. and Coat. Tech. 65:1994;154-159.
11. Kolitsch A., Sümmchen L., Ullmann J., Falke U., Heger P. Post-implantation of ions into amorphous carbon films. Surface and coatings Technology. 84:1996;495-499.
12. Doll G.L., Heremans J.P., Perry T.A., Mantese J.V. Optical and electronic properties of nitrogen-implanted diamond-like carbon films. J. Mater. Res. 9:(1):1994;85-90.
13. Compagnini G., Zammit U., Madhusoodanan K.N., Foti G. Disorder and absorption edges in ion-irradiated hydrogenated amorphous carbon films. Phys. Rev. B. 51:(16):1995;11 168-11 171.
14. Paterson M.J., Orrman-Rossiter K.G., Bhargava S., Hoffman A. Physico-chemical changes in a-C:H by MeV He ion irradiation. J. Appl. Phys. 75:(2):1994;792-796.
15. Yoon S.F., Yang H., Rusli, Ahn J., Zhang Q., Poo T.L. Influence of substrate temperature and microwave power on the properties of a-C:H films prepared using the ECR-CVD method. Diamond Relat. Mater. 6:1997;1683-1688.
16. Watt F., Oelic I., Loh K.K., Sow C.H., Thong P., Liew S.C., Osipowicz T., Choo T.F., Tang S.M. The national university of Singapore nuclear microscope facility. Nucl. Instr. Meth. Phys. Res. B85:1994;708-715.
17. M. Mager, SIMNRA User's Guide, Report IPP9/113, Max-Planck-Institut für Plasmaphysik, Garching, Germang, 1997.
18. Efstthiadis H., Akkerman Z.L., Smith F.W. Atomic bonding in amorphous carbon alloys: a thermodynomic approach. J. Appl. Phys. 79:(6):1996;2954-2967.
19. Eckstein W. Computer simulation of ion-solid interaction. Springer Ser. Mater. Sci. 10:1991;Springer, Berlin Heidelberg.
20. Adel M.E., Amir O., Kalish R., Feldman L.C. Ion-beam-induced hydrogen release from a-C:H: a brlk molecular recombination model. J. Appl. Phys. 66:(7):1989;3248-3251.
21. Dillon R.O., Woollam J.A., Katkanant V. Use of Raman scattering to investigate diaorder and crystalline formation in as-deposited and annealed carbon films. Phys. Rev. B29:(6):1984;3482-3489.
22. Tuinstra F., Koenig J.L. Raman spectrum of graphite. J. Chem. Phys. 53:(3):1970;1126-1130.
23. Rusli, Yoon S.F., Yang H., Zhang Q., Ahn J., Fu Y.L. Effect of pressure on the deposition of a-C:H films using the ECR-CVD. J. Vac. Sci. Technol. A16:1998;572.
24. Tamor M.A., Vassell W.C. Raman fingerprinting of amorphous carbon films. J. Appl. Phys. 76:(6):1994;3823-3830.
25. Al-Jishi R., Dresselhaus G. Lattice-dynamical model for graphite. Phys. Rev. B26:(8):1982;4514-4522.
26. Oshima C., Aizawa T., Souda R., Ishizawa Y., Sumiyoshi Y. Surface phonon dispersion curves of graphite (0001) over the entire energy region. Solid State Commun. 65:1988;1601.
27. Akkerman Z.L., Efstthiadis H., Smith F.W. Thermal stability of diamond-like carbon films. J. Appl. Phys. 80:(5):1996;3068-3075.
28. Robertson J. Structure and electronic properties of diamond-like carbon. Clausing R.E., Horton L.L., Angus J.C., Koidl P. Diamond and Diamond-like Films and Coatings. 1990;331 Plenum Press, New York.
29. Zhang Q., Yoon S.F., Rusli, Yang H., Ahn J. Influence of oxygen on the thermal stability of a-C:H films. J. Appl. Phys. 83:(3):1998;1349-1353.