A hybrid simulation of high pressure sputtering, combining the Monte Carlo method and the diffusive approach

Thin Solid Films

Volumn 343-344, Issue 1-2, 1999, Pages 24-26

  Nakano, T ^a   Baba, S ^a  

^a SEIKEI UNIVERSITY   (Japan)

Author keywords

Computer simulation; Diffusion; Sputtering

Indexed keywords

BOUNDARY ELEMENT METHOD; COMPUTER SIMULATION; DIFFUSION IN SOLIDS; FILM GROWTH; FILM PREPARATION; MONTE CARLO METHODS;

HIGH PRESSURE SPUTTERING; POISSON'S EQUATION;

SPUTTER DEPOSITION;

EID: 0032676831     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)80012-1     Document Type: Article

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