Development of a depth controlling nanoindentation tester with subnanometer depth and submicro-newton load resolutions

Review of Scientific Instruments

Volumn 68, Issue 9, 1997, Pages 3494-3503

  Shimamoto, Atsushi ^a   Tanaka, Kohichi ^a  

^a NAGAOKA UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001280520     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1148313     Document Type: Article

References (11)

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2. Nanoindenter-II, Knoxville, Tennessee, USA. The related information can be found in Ref. 1.
3. ENT-1040, Elionix Corp., Hachioji-city, Tokyo Japan.
4. J. B. Pethica, R. Hutchings, and W. C. Oliver, Philos. Mag. A 48, 593 (1983).
5. A. Shimamoto and K. Tanaka, Appl. Opt. 34, 5854 1995).
6. R. O. Cook and C. W. Hamm. Appl. Opt. 18, 3230 1979).
7. A. Shimamoto and K. Tanaka, Appl. Opt. 35, 6767 (1996).
8. A. Shimamoto, K. Tanaka, Y. Akiyama, and H. Yoshizaki, Philos. Mag. A 74, 1097 (1996).
9. TOIC-129LA, Herz Industry Co., Ltd., Fujisawa-city, Kanagawa, Japan.
10. R. Erlandsson, G. M. McClelland, C. M. Mate, and S. Chiang, J. Vac. Sci. Technol. A 6, 266 (1988).
11. J. G. Ziegler and N. B. Nichols, Trans. ASME 64, 759 (1942).