Studies of the effect of proton irradiation on 6H-SiC pn junction properties

Materials Science and Engineering B

Volumn 61-62, Issue , 1999, Pages 450-453

  Lebedev, Alexandre A ^a   Strel'chuk, Anatoly M ^a,b   Kozlovski, Vitali V ^c   Savkina, Natalia S ^a   Davydov, Denis V ^a   Solov'ev, Viktor V ^a  

^a IOFFE INSTITUTE   (Russian Federation)

^b UNIVERSITÉ MONTPELLIER 2   (France)

^c PETER THE GREAT ST PETERSBURG POLYTECHNIC UNIVERSITY   (Russian Federation)

Author keywords

6H SiC; Compensation; Deep levels; Lifetimes; Proton irradiation

Indexed keywords

PROTON IRRADIATION;

ANNEALING; CURRENT VOLTAGE CHARACTERISTICS; HIGH TEMPERATURE EFFECTS; PROTONS; SEMICONDUCTING SILICON COMPOUNDS; SILICON CARBIDE;

SEMICONDUCTOR JUNCTIONS;

EID: 0032675178     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(98)00553-4     Document Type: Article

References (14)

1. Kozlovskii V.V., Ponamarev S.I., Kozlovskaya I.A. Tekh. Phys. Lett. 20:1994;46.
2. Il'in M.A., Kosagonova M.G., Solomatin V.N., Barinov Yu.V., Bulgakov Yu.V. Sov. Phys. Semic. 5:1971;506.
3. Itoh H., Yoshikawa M., Nashiyama I., Misawa S., Okumura H., Yoshida S. J. Electron. Mater. 21:1992;707.
4. Rubicki G. J. Appl. Phys. 78:1995;2996.
5. Friessnegg T., Dannefaer S. Mater. Sci. Forum. 258-263:1997;721.
6. Anikin M.M., Guseva N.B., Dmitriev V.A., Syrkin A.L. Izv. Akad. Nauk USSR. Neorg. Mater. 10:1984;1768.
7. A.A. Lebedev, M.G. Rastegaeva, S.N. Savkina, A.M. Strel'chuk, A.A. Mal'tsev, V.E. Chelnokov, N.K. Poletaev, Inst. Phys. Conf. N142, Chapter 3, Institute of Physics Publishing, Bristol and Philadelphia, 1996, p. 501.
8. Palmour J.W., Edmond J.A., Kong H.S., Carter C.H. J. Phys. B. 185:1993;461.
9. A.M. Strel'chuk, A.A. Lebedev, V.V. Kozlovski, N.S. Savkina, D.V. Davydov, V.V. Solov'ev and M.G. Rastegaeva. Presented at E-MRS, Strasburg, France, June 1998.
10. Anikin M.M., Zubrilov A.S., Lebedev A.A., Strel'chuk A.M., Cherenkov A.E. Sov. Phys. Semicond. 25:1991;289.
11. H. Zhang, G. Pensl, A. Dorner, S. Leibenzeder, Ext. Abstr. Electrochem. Soc. Mtg. 89 (2) (1989) 699.
12. Dalibor T., Pensl G., Matsunami H., Kimoto T., Choyke W.J., Schoner A., Nordel N. Phys. Stat. Sol (a). 162:1997;199.
13. Anikin M.M., Lebedev A.A., Syrkin A.L., Suvorov A.V. Sov. Phys. Sem. 19:1985;69.
14. Baranov P.G., Il'in I.V., Mokhov E.N. Phys. Solid State. 40:1998;36.