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Volumn 59, Issue 2, 1999, Pages 136-138

Study of fluorine diffusion in metallized polymers using ion beam techniques

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; DIFFUSION IN SOLIDS; FLUORINE; GAMMA RAYS; INTERFACES (MATERIALS); ION BEAMS; ION BOMBARDMENT; METALLIZING; PLASTIC FILMS; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

EID: 0032673794     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0254-0584(99)00024-3     Document Type: Article
Times cited : (6)

References (7)
  • 1
    • 0031256176 scopus 로고    scopus 로고
    • Low-dielectric constant materials for ULSI interlayer dielectric applications
    • in: W.W. Lee, P.S. Ho (Guest Editors)
    • Low-dielectric constant materials for ULSI interlayer dielectric applications, in: W.W. Lee, P.S. Ho (Guest Editors), Materials Research Society Bulletin, Vol. 22, No. 10, 1997, pp. 19-69.
    • (1997) Materials Research Society Bulletin , vol.22 , Issue.10 , pp. 19-69


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.