Fabrication method for multiple wavelength vertical-cavity emitter arrays by SiNx layer thickness control

IEEE Photonics Technology Letters

Volumn 11, Issue 5, 1999, Pages 509-511

  Shin, Jae Heon ^a   Yoo, Byueng Su ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; THICKNESS CONTROL; WAVELENGTH DIVISION MULTIPLEXING;

VERTICAL CAVITY SURFACE EMITTING LASERS (VCSEL);

SEMICONDUCTOR LASERS;

EID: 0032672704     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/68.759381     Document Type: Article

References (8)

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