Removal of codeposited layers by ECR discharge cleaning

Journal of Nuclear Materials

Volumn 266, Issue , 1999, Pages 552-556

  Jacob, W ^a   Landkammer, B ^a   Wu, C H ^a  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CARBON; CLEANING; DEPOSITION; DEUTERIUM; ELECTRON CYCLOTRON RESONANCE; EROSION; EXPERIMENTAL REACTORS; GLOW DISCHARGES; HYDROGEN; OXYGEN; TRITIUM;

INTERNATIONAL THERMONUCLEAR EXPERIMENTAL REACTORS (ITER);

FUSION REACTORS;

EID: 0032672106     PISSN: 00223115     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3115(98)00588-1     Document Type: Article

References (15)

1. G. Federici et al., these Proceedings.
2. A.T. Peacock et al., these Proceedings.
3. W. Wang, W. Jacob, J. Roth, J. Nucl. Mater. 245 (1997) 66.
4. K. Maruyama, W. Jacob, J. Roth, J. Nucl. Mater. 264 (1999) 56.
5. W.L. Hsu, J. Vac. Sci. Technol. A 7 (1989) 1047.
6. C.A. Outten, J.C. Barbour, W.R. Wampler, J. Vac. Sci. Technol. A9 (1991) 717.
7. A. Annen, W. Jacob, J. Appl. Phys. Lett. 71 (1997) 1326.
8. A. von Keudell, W. Jacob, J. Appl. Phys. Lett. 79 (1995) 1322.
9. A. von Keudell, W. Jacob, J. Appl. Phys. 79 (1996) 1092.
10. W. Jacob, Thin Solid Films 326 (1998) 1.
11. B. Landkammer, A. von Keudell, W. Jacob, J. Nucl. Mater. 264 (1999) 48.
12. P. Koidl, C. Wild, B. Dischler, M. Ramsteiner, Mater. Sci. Forum 52&53 (1989) 41.
13. W. Fukarek, A. von Keudell, Rev. Sci. Instrum. 66 (1995) 3545.
14. B. Landkammer, P. Pecher, W. Jacob, Role of ions in oxygen glow discharge erosion of hydrogenated carbon films, J. Appl. Phys., to be published.
15. A. Horn, A. Schenk, J. Biener, B. Winter, C. Lutterloh, M. Wittmann, J. Küppers, Chem. Phys. Lett. 231 (1994) 193.