Ultrasonic X-Y stage using 10 MHz surface acoustic wave

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 1994, Pages 535-538

  Kurosawa, Minoru ^a   Takahashi, Masakazu ^a   Higuchi, Toshiro ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC TRANSDUCERS; ACOUSTIC WAVES; FREQUENCIES; SPEED; SPEED CONTROL; STATORS; SURFACE WAVES; SURFACES; ULTRASONIC EQUIPMENT;

RAYLEIGH WAVE; ULTRASONIC MOTORS; VIBRATION DISPLACEMENT;

LINEAR MOTORS;

EID: 0028740089     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)